Investigation of Microholes Produced by Focused Ion Beam Micromachining

Investigation of Microholes Produced by Focused Ion Beam Micromachining

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...

Full description

Bibliographic Details
Main Authors: Mohd. Fuad, Nurul Hajar, Ali, Mohammad Yeakub
Other Authors: Adesta, Erry Yulian Triblas
Format: Book Chapter
Language:English
Published: Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM 2010
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/2517/
http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf

Similar Items

Similar Items