Fabrication of Bio-MEMS Nanostructure by focused ion beam
This work investigated the influence of two FIB process parameters, (i) acceleration voltage, (ii) dwell time with respect to milled depth. The response variable was average surface roughness (Ra). Statistical models of responses were developed using Taguchi method of design of experiment. Signal to...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/ http://irep.iium.edu.my/2433/1/ICAMN%2710-DS_009.pdf |