Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon
Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittlene...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/23056/ http://irep.iium.edu.my/23056/ http://irep.iium.edu.my/23056/1/p130.pdf |
| Summary: | Silicon has been widely used in different branches of industrial engineering. Most application of
silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips.
Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a
major limitation as the process of removing the material can generate subsurface damage. Silicon is
conventionally finished using grinding followed by polishing and lapping to achieve required surface
finish and surface integrity... |
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