Investigation of microholes produced by focused ion beam micromachining

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...

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Main Authors:	Mohd Fuad, Nurul Hajar, Ali, Mohammad Yeakub
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2011
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf

id	iium-2279
recordtype	eprints
spelling	iium-22792013-06-27T08:22:41Z http://irep.iium.edu.my/2279/ Investigation of microholes produced by focused ion beam micromachining Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio. Trans Tech Publications, Switzerland 2011-06-30 Article PeerReviewed application/pdf en http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf Mohd Fuad, Nurul Hajar and Ali, Mohammad Yeakub (2011) Investigation of microholes produced by focused ion beam micromachining. Advanced Materials Research, 264. pp. 1346-1351. ISSN 1022-6680 http://www.scientific.net doi:10.4028/www.scientific.net/AMR.264-265.1346
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub Investigation of microholes produced by focused ion beam micromachining
description	This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio.
format	Article
author	Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub
author_facet	Mohd Fuad, Nurul Hajar Ali, Mohammad Yeakub
author_sort	Mohd Fuad, Nurul Hajar
title	Investigation of microholes produced by focused ion beam micromachining
title_short	Investigation of microholes produced by focused ion beam micromachining
title_full	Investigation of microholes produced by focused ion beam micromachining
title_fullStr	Investigation of microholes produced by focused ion beam micromachining
title_full_unstemmed	Investigation of microholes produced by focused ion beam micromachining
title_sort	investigation of microholes produced by focused ion beam micromachining
publisher	Trans Tech Publications, Switzerland
publishDate	2011
url	http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/ http://irep.iium.edu.my/2279/1/AMR_2011_Vol_264-265__1346-1351.pdf
first_indexed	2023-09-18T20:09:49Z
last_indexed	2023-09-18T20:09:49Z
_version_	1777407402696507392

Investigation of microholes produced by focused ion beam micromachining

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