A comparative study on MEMS piezoelectric microgenerators

The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of ‘green’ MEMS energy harvesters has become even more dominant. This pape...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Salleh, Hanim
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2010
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/1/Microsystems2010microgenerators.pdf

id	iium-1951
recordtype	eprints
spelling	iium-19512016-03-17T01:00:52Z http://irep.iium.edu.my/1951/ A comparative study on MEMS piezoelectric microgenerators Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim TK7885 Computer engineering The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of ‘green’ MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented. Springer Berlin / Heidelberg 2010-10 Article PeerReviewed application/pdf en http://irep.iium.edu.my/1951/1/Microsystems2010microgenerators.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) A comparative study on MEMS piezoelectric microgenerators. Microsystems Technologies, 16 (10). pp. 1673-1681. ISSN 1432-1858 (O), 0946-7076 (P) https://link.springer.com/article/10.1007%2Fs00542-010-1086-9#page-1 10.1007/s00542-010-1086-9
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim A comparative study on MEMS piezoelectric microgenerators
description	The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of ‘green’ MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented.
format	Article
author	Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim
author_facet	Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim
author_sort	Md Ralib @ Md Raghib, Aliza 'Aini
title	A comparative study on MEMS piezoelectric microgenerators
title_short	A comparative study on MEMS piezoelectric microgenerators
title_full	A comparative study on MEMS piezoelectric microgenerators
title_fullStr	A comparative study on MEMS piezoelectric microgenerators
title_full_unstemmed	A comparative study on MEMS piezoelectric microgenerators
title_sort	comparative study on mems piezoelectric microgenerators
publisher	Springer Berlin / Heidelberg
publishDate	2010
url	http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/ http://irep.iium.edu.my/1951/1/Microsystems2010microgenerators.pdf
first_indexed	2023-09-18T20:09:30Z
last_indexed	2023-09-18T20:09:30Z
_version_	1777407382260809728

A comparative study on MEMS piezoelectric microgenerators

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