Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche applicati...

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Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Othman, Raihan, Salleh, Hanim
Format: Article
Language:English
Published: Springer Berlin / Heidelberg 2011
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/1/Microsystems2011_aeroacoustics.pdf
id iium-1944
recordtype eprints
spelling iium-19442016-03-17T00:47:31Z http://irep.iium.edu.my/1944/ Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Othman, Raihan Salleh, Hanim TK7885 Computer engineering Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using CoventorwareTM. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the CoventorwareTM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts. Springer Berlin / Heidelberg 2011-02-05 Article PeerReviewed application/pdf en http://irep.iium.edu.my/1944/1/Microsystems2011_aeroacoustics.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Othman, Raihan and Salleh, Hanim (2011) Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications. Microsystems Technologies, 17 (4). pp. 563-573. ISSN 1432-1858 (O), 0946-7076 (P) http://www.springerlink.com/content/0946-7076/17/4/ 10.1007/s00542-011-1228-8
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
description Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using CoventorwareTM. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the CoventorwareTM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts.
format Article
author Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
author_facet Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Othman, Raihan
Salleh, Hanim
author_sort Md Ralib @ Md Raghib, Aliza 'Aini
title Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_short Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_full Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_fullStr Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_full_unstemmed Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
title_sort design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications
publisher Springer Berlin / Heidelberg
publishDate 2011
url http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/
http://irep.iium.edu.my/1944/1/Microsystems2011_aeroacoustics.pdf
first_indexed 2023-09-18T20:09:29Z
last_indexed 2023-09-18T20:09:29Z
_version_ 1777407381673607168

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