Design and modelling of an impedance-based MEMS biosensor

This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to...

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Main Authors:	Jamil, Nadira, Nordin, Anis Nurashikin, Voiculescu, Ioana
Format:	Conference or Workshop Item
Language:	English
Published:	2011
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf

id	iium-15123
recordtype	eprints
spelling	iium-151232012-01-20T05:36:06Z http://irep.iium.edu.my/15123/ Design and modelling of an impedance-based MEMS biosensor Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana TK7885 Computer engineering This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to verify the functionality and obtain the optimal design parameters for detection of biological cells. Placement of the cells at the centre of the device will load the acoustic waves, resulting in a damped and slower electrical signal. Our design aims to defeat limitations of the current biosensor in terms of cost, size and most important the speed of analysis. Impedance-based MEMS biosensor has the ability to monitor the cell response to electricity flow. A two dimensional finite element model (FEM) was created using COMSOL Multiphysics 3.5a to observe the change in impedance of the device model. 2011-09 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/15123/1/06088352.pdf Jamil, Nadira and Nordin, Anis Nurashikin and Voiculescu, Ioana (2011) Design and modelling of an impedance-based MEMS biosensor. In: Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on, 28-30 Sept., 2011, Kota Kinabalu. http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6086117
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TK7885 Computer engineering
spellingShingle	TK7885 Computer engineering Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana Design and modelling of an impedance-based MEMS biosensor
description	This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to verify the functionality and obtain the optimal design parameters for detection of biological cells. Placement of the cells at the centre of the device will load the acoustic waves, resulting in a damped and slower electrical signal. Our design aims to defeat limitations of the current biosensor in terms of cost, size and most important the speed of analysis. Impedance-based MEMS biosensor has the ability to monitor the cell response to electricity flow. A two dimensional finite element model (FEM) was created using COMSOL Multiphysics 3.5a to observe the change in impedance of the device model.
format	Conference or Workshop Item
author	Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana
author_facet	Jamil, Nadira Nordin, Anis Nurashikin Voiculescu, Ioana
author_sort	Jamil, Nadira
title	Design and modelling of an impedance-based MEMS biosensor
title_short	Design and modelling of an impedance-based MEMS biosensor
title_full	Design and modelling of an impedance-based MEMS biosensor
title_fullStr	Design and modelling of an impedance-based MEMS biosensor
title_full_unstemmed	Design and modelling of an impedance-based MEMS biosensor
title_sort	design and modelling of an impedance-based mems biosensor
publishDate	2011
url	http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/ http://irep.iium.edu.my/15123/1/06088352.pdf
first_indexed	2023-09-18T20:24:09Z
last_indexed	2023-09-18T20:24:09Z
_version_	1777408304695214080

Design and modelling of an impedance-based MEMS biosensor

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