Investigation of finish cut of microelectrodischarge milling for nanosurface finish

In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness heig...

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Main Authors:	Ali, Mohammad Yeakub, Mehfuz, R.
Format:	Article
Language:	English
Published:	A V S AMER INST PHYSICS, USA 2009
Subjects:	QC Physics TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf

id	iium-14898
recordtype	eprints
spelling	iium-148982012-03-22T01:11:58Z http://irep.iium.edu.my/14898/ Investigation of finish cut of microelectrodischarge milling for nanosurface finish Ali, Mohammad Yeakub Mehfuz, R. QC Physics TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s−1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems. A V S AMER INST PHYSICS, USA 2009-05 Article PeerReviewed application/pdf en http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf Ali, Mohammad Yeakub and Mehfuz, R. (2009) Investigation of finish cut of microelectrodischarge milling for nanosurface finish. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27 (3). pp. 1330-1334. ISSN 1071-1023 http://dx.doi.org/10.1116/1.3079701 doi:10.1116/1.3079701
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	QC Physics TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	QC Physics TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering Ali, Mohammad Yeakub Mehfuz, R. Investigation of finish cut of microelectrodischarge milling for nanosurface finish
description	In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s−1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems.
format	Article
author	Ali, Mohammad Yeakub Mehfuz, R.
author_facet	Ali, Mohammad Yeakub Mehfuz, R.
author_sort	Ali, Mohammad Yeakub
title	Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_short	Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_full	Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_fullStr	Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_full_unstemmed	Investigation of finish cut of microelectrodischarge milling for nanosurface finish
title_sort	investigation of finish cut of microelectrodischarge milling for nanosurface finish
publisher	A V S AMER INST PHYSICS, USA
publishDate	2009
url	http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/ http://irep.iium.edu.my/14898/4/JVST_B__2009_27%283%29_1330-1334.pdf
first_indexed	2023-09-18T20:24:00Z
last_indexed	2023-09-18T20:24:00Z
_version_	1777408294425460736

Investigation of finish cut of microelectrodischarge milling for nanosurface finish

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