Fabrication and characterization of sub polymeric microring resonators for biosensors

In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam litho...

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Main Authors:	Mohd Salleh, Mohd Hazimin, Cooper, Jonathan M, Glidle, Andrew
Format:	Conference or Workshop Item
Language:	English
Published:	2009
Subjects:	Q Science (General) QC Physics
Online Access:	http://irep.iium.edu.my/12513/ http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf

id	iium-12513
recordtype	eprints
spelling	iium-125132012-05-18T00:41:21Z http://irep.iium.edu.my/12513/ Fabrication and characterization of sub polymeric microring resonators for biosensors Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew Q Science (General) QC Physics In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress. 2009 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf Mohd Salleh, Mohd Hazimin and Cooper, Jonathan M and Glidle, Andrew (2009) Fabrication and characterization of sub polymeric microring resonators for biosensors. In: 5th IEEE EMBS UK & Republic of Ireland Postgraduate Conference on Biomedical Engineering and Medical Physics, 12th - 14th July, 2009, Oxford University.
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	Q Science (General) QC Physics
spellingShingle	Q Science (General) QC Physics Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew Fabrication and characterization of sub polymeric microring resonators for biosensors
description	In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in biological (aqueous) media (e.g. to measure protein or DNA interactions). Fabrication steps and results obtained by using UV photolithography at 2μm gap and electron beam lithography showing the fabrication of microring with 200μm of radius with a 200nm critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses was performed by using HeNe laser 632.8 nm of wavelengths. Future work on microring resonator characterization and optimisation, including optimisation of the Q factor, resonance wavelength shift using visible wavelength are currently in progress.
format	Conference or Workshop Item
author	Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew
author_facet	Mohd Salleh, Mohd Hazimin Cooper, Jonathan M Glidle, Andrew
author_sort	Mohd Salleh, Mohd Hazimin
title	Fabrication and characterization of sub polymeric microring resonators for biosensors
title_short	Fabrication and characterization of sub polymeric microring resonators for biosensors
title_full	Fabrication and characterization of sub polymeric microring resonators for biosensors
title_fullStr	Fabrication and characterization of sub polymeric microring resonators for biosensors
title_full_unstemmed	Fabrication and characterization of sub polymeric microring resonators for biosensors
title_sort	fabrication and characterization of sub polymeric microring resonators for biosensors
publishDate	2009
url	http://irep.iium.edu.my/12513/ http://irep.iium.edu.my/12513/1/Full_paper_PGBiomed09_MHSkpt.pdf
first_indexed	2023-09-18T20:21:42Z
last_indexed	2023-09-18T20:21:42Z
_version_	1777408150373138432

Fabrication and characterization of sub polymeric microring resonators for biosensors

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