Fabrication and characterization of SU8 Polymeric microring resonators for biosensors

In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in liquid mediums. Microring resonators offer the advantage of reducing the device size by orders of magnitude without scarifying the interaction length. The strength of the inter...

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Main Authors:	Mohd Salleh, Mohd Hazimin, Wilson, Ross, Glidle, Andrew, Marc, Sorel, Cooper, Jonathan M
Format:	Conference or Workshop Item
Language:	English
Published:	2009
Subjects:	QA Mathematics QC Physics
Online Access:	http://irep.iium.edu.my/12501/ http://irep.iium.edu.my/12501/1/Abstract__PGBiomed09_Edited.pdf

id	iium-12501
recordtype	eprints
spelling	iium-125012012-02-10T02:13:54Z http://irep.iium.edu.my/12501/ Fabrication and characterization of SU8 Polymeric microring resonators for biosensors Mohd Salleh, Mohd Hazimin Wilson, Ross Glidle, Andrew Marc, Sorel Cooper, Jonathan M QA Mathematics QC Physics In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in liquid mediums. Microring resonators offer the advantage of reducing the device size by orders of magnitude without scarifying the interaction length. The strength of the interaction can be measured by their resonance wavelength shift at high quality-factor (Q) resonance. High Q factor enables the achievement of high sensitivity due to the long residence times of the photons that propagate in the ring, which increases the probability of photons interacting with the analytes in solution. The refractive index contrast between liquid and polymer waveguide controls the resonance wavelength and strength of coupling between the waveguide and resonator. Preliminary simulation and theoretical calculation using Rsoft Photonics CAD are presented. Fabrication steps and results obtained by using UV photolithography and electron beam lithography showing the fabrication of microring with 200μm of radius, 200nm of critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses were performed by using HeNe laser 632.8 nm wavelengths. Future work on microring resonator characterization such as Q factor, resonance wavelength shift using visible wavelength are currently in progress. Initial work on the application of biosensing will also be shown. 2009 Conference or Workshop Item NonPeerReviewed application/pdf en http://irep.iium.edu.my/12501/1/Abstract__PGBiomed09_Edited.pdf Mohd Salleh, Mohd Hazimin and Wilson, Ross and Glidle, Andrew and Marc, Sorel and Cooper, Jonathan M (2009) Fabrication and characterization of SU8 Polymeric microring resonators for biosensors. In: PGBioMed 2009, 12th - 14th July, 2009, Magdalen College. (Unpublished)
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	QA Mathematics QC Physics
spellingShingle	QA Mathematics QC Physics Mohd Salleh, Mohd Hazimin Wilson, Ross Glidle, Andrew Marc, Sorel Cooper, Jonathan M Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
description	In this paper, SU8 polymer was used to fabricate a waveguide and microring resonator for optical biosensing applications in liquid mediums. Microring resonators offer the advantage of reducing the device size by orders of magnitude without scarifying the interaction length. The strength of the interaction can be measured by their resonance wavelength shift at high quality-factor (Q) resonance. High Q factor enables the achievement of high sensitivity due to the long residence times of the photons that propagate in the ring, which increases the probability of photons interacting with the analytes in solution. The refractive index contrast between liquid and polymer waveguide controls the resonance wavelength and strength of coupling between the waveguide and resonator. Preliminary simulation and theoretical calculation using Rsoft Photonics CAD are presented. Fabrication steps and results obtained by using UV photolithography and electron beam lithography showing the fabrication of microring with 200μm of radius, 200nm of critical coupling gap are presented. Characterization of the SU8 waveguide including propagation and bending losses were performed by using HeNe laser 632.8 nm wavelengths. Future work on microring resonator characterization such as Q factor, resonance wavelength shift using visible wavelength are currently in progress. Initial work on the application of biosensing will also be shown.
format	Conference or Workshop Item
author	Mohd Salleh, Mohd Hazimin Wilson, Ross Glidle, Andrew Marc, Sorel Cooper, Jonathan M
author_facet	Mohd Salleh, Mohd Hazimin Wilson, Ross Glidle, Andrew Marc, Sorel Cooper, Jonathan M
author_sort	Mohd Salleh, Mohd Hazimin
title	Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
title_short	Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
title_full	Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
title_fullStr	Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
title_full_unstemmed	Fabrication and characterization of SU8 Polymeric microring resonators for biosensors
title_sort	fabrication and characterization of su8 polymeric microring resonators for biosensors
publishDate	2009
url	http://irep.iium.edu.my/12501/ http://irep.iium.edu.my/12501/1/Abstract__PGBiomed09_Edited.pdf
first_indexed	2023-09-18T20:21:42Z
last_indexed	2023-09-18T20:21:42Z
_version_	1777408149934833664

Fabrication and characterization of SU8 Polymeric microring resonators for biosensors

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